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Gantry Air-bearing(Ceramic) Stage: Display – Lithography; 제품문의하기 목록으로

상세정보

Structure: Gantry Air-bearing(Ceramic) Stage
Application: LCD Gen-8.6 (2,250 * 2,600)

•C/F Align Maker

Specifications:

•Size: 3,790 * 4,260 * 2,560 (24 ton)

•Max. Travel: 2,900 * 2,550

•Max. Accel.: 0.3G, Max. Velocity: 700mm/s

•Position Accuracy: ±1.0um@2,800mm

•Repeatability: ±0.3um @2,800mm

•Straightness, Flatness: ±3.0um @2,800mm

•In-position Stability: ±30nm

•Yaw error: ±0.1arc-sec

•Feedback: Linear Scale (Zerodur)

•Lifter: Pin Up/Dn

Lead time: 20 weeks (production)
Production: 2020.10