(주)디엠티

상세정보

Structure: Stacked X/Y/T stage
Application: SEMI-200mm

•Overlay Metrology

•OCD, …

Specifications:

•Travel: 270 * 270 * 360°

•Max. Acceleration: 0.5G

•Max. Velocity: 300mm/s

•Bi-dir. Repeatability: ±200nm

•Straightness: ±2.0um

•Flatness: ±2.0um

•In position stability: < ±2.0nm, < ±5.0nm(T)

•Fine Theta(Align)

Lead time: 14 weeks (production)

•Prototype: 2017 ~